Project database

The page provides a list of national and international projects where FER participates or has participated as a project coordinator or partner.


Projects

   

Project

Acronym:
- 
Name:
Layout design of test structures for integrated detectors 
Project status:
From: 2009-09-01 To: 2010-09-01 (Completed)
Type (Programme):
BILAT 
Project funding:
-

International partner

Organisation Name:
Delft University of Technology 
Organisation adress:
Feldmannweg 17, 2628 CT Delft 
Organisation country:
Nizozemska 
Contact person name:
- 
Contact person email:
 

Croatian partner

Organisation name:
Fakultet elektrotehnike i računarstva 
Organisation address:
ZEMRIS, Unska 3, 10000 Zagreb  
Contact person name:
Tomislav Suligoj
Contact person tel:
+385 1 6129898 
Contact person fax:
+385 1 6129653 
Contact person e-mail:
Email 

Short description of project

Due to the scaling of photolithography used in semiconductor technology, the wavelength of light used as a source for the expoure systems has been reduced into the Deep Ultra Violet (DUV) and Extreme Ultra Violet (EUV) range. Since the penetration of light of these wavelengths is in nanometer range in silicon, special photodetector structure with ultra-shallow junction has to be developed and optmimized. 

Short description of the task performed by Croatian partner

Simulation of photodetector response on DUV and EUV light. Optimization of photodetector structure for the maximum sensitivity and speed. Determination of optimum layout of photodetectors.