Low-power electronic sensor systems for acoustic event detection

Project Summary

The autonomy of wireless sensor systems embedded in the environment, such as systems for the detection of acoustic or ultrasonic events (emissions) used in industry (non-destructive testing, NDT), infrastructure monitoring, preventive maintenance of machines, detection of leaks, cavitation, in implantable medical hearing devices and similar, depends on energy consumption of the sensor system.

This project explores a novel concept of a sensor system on chip for low-power acoustic event detection, composed of a contact acoustic microelectromechanical (MEMS) sensor designed as fully passive array of narrowband frequency-selective piezoelectric microresonators, combined with an low-power multi-channel microelectronic readout and signal processing circuit on chip.

Through this research topic, the goal is to:

  • Establish a research group with competencies in the design of low-power electronic sensor systems that combines knowledge from the fields of microelectromechanical (MEMS) sensor technologies and microelectronic circuit design.
  • Acquire competences for independent modeling, design and characterization of MEMS sensors.
  • Maintain continuity of access to the top EU technological cleanroom infrastructure for MEMS microfabrication and expand the network of contacts.
  • Make technological breakthroughs in design of electronic sensor circuits on chip.
  • Develop the careers of young researchers.
  • Increase the potential for creation and protection of intellectual property in the aforementioned areas.

 

Duration

The project duration if from July 1st 2023 to June 30th 2026.

 

Team

Asst. Prof. Dinko Oletić - Project leader, Department of Electronic Systems and Information Processing

Dr. sc. Jurica Kundrata - Researcher, Department of Electronics, Microelectronics, Computer and Intelligent Systems

Dr. sc. Boris Okorn - Researcher, Department of Communication and Space Technologies

Edi Emanović - Researcher, Department of Electronic Systems and Information Processing

Mihael Katalenić - Researcher, Department of Electronic Systems and Information Processing

Ivana Berković - Administrator, Center for Research and Innovation

 

Acknowledgment

This research project has been supported by the European Union - NextGenerationEU under the grant NPOO.C3.2.R2-I1.06.0090. Value of the project is 726.376,29 €.

 

Contact

Asst. Prof. Dr. Sc. Dinko Oletić
University of Zagreb Faculty of Electrical Engineering and Computing
Department of Electronic Systems and Information Processing
Unska 3, HR-10000 Zagreb, Croatia
tel: + 385 1 6129 432
e-mail: dinko (dot) oletic (at) fer (dot) hr

News

First generation of our ASIC chips...

During August 2025, a first generation of ASIC chips, designed in TSMC 65 nm CMOS technology, and prototyped through Europractice programme, has arrived. The prototyped chip implements a low-power mixed-signal multichannel electronic sensor readout interface for our custom-designed resonant ultrasonic piezoelectric MEMS sensors. The chip will be functionally tested in laboratory during autumn.

Author: Dinko Oletić
Usage of cleanroom equipment at IJL,...

University of Zagreb Faculty of Electrical Engineering and Institute Jean Lamour, Université de Lorrainé, Nancy, France have signed a Contract for usage of IJL's material science cleanroom laboratory infrastructure and equipment for thin-film piezoelectric material deposition and characterization, as part of piezo-MEMS prototyping activities. Researchers Dinko Oletić and Mihael Katalenić visited IJL, Nancy during June, 2025 conducting test ZnO piezoelectric depositions, hosted by Dr. Sami Hage-Ali.

Author: Dinko Oletić
Visit of MEMS researchers from...

On 05.06.2025 at University of Zagreb, the research team hosted a visit of group of colleagues from University of Tokyo, Japan, led by prof. Yoshio Mita. Prof. Mita leads a prominent research-group in MEMS sensor design, and manages the academic cleanroom infrastructure of University of Tokyo. Prof. Mita gave a public lecture presenting the work of his group, was given a tour of our Faculty's laboratories, and discussed possibilities for research collaboration with our team.

Author: Dinko Oletić
Paper presented at IEEE DTIP 2025...

Between 01.-04.06.2026 Mihael Katalenic and Dinko Oletic presented their paper at the 27th edition of the IEEE conference DTIP 2025 held this year in Split. Mihael Katalenic gave the talk titled "Designing cantilever-based resonator arrays in PiezoMUMPs technology for in-sensor ultrasonic frequency decomposition of acoustic emissions". The paper will be published in IEEEXplore.

Author: Dinko Oletić
Paper presented at the AMA SMSI 2025...

From 06.-08.05.2025 researchers Dinko Oletic and Mihael Katalenic participated at the SMSI 2025 conference in Nuremberg, Germany. Dinko Oletic presented the paper titled "Experimental comparison of receive sensitivity of circular and ring piezo-electrodes geometries for PMUT resonator membranes designed in PiezoMUMPS process". The paper is available for download here.

Author: Dinko Oletić
New vibrometry setup for...

In January 2025, an infrared laser Michelson interferometry based vibrometry setup was installed in our laboratory, enabling multi-purpose optical, contact-less, nano-scale characterization of MEMS samples: confocal infrared microscopic (sub)surface inspection, 3D topology and profilometry, dynamic in- and out-of-plane mechanical and electro-mechanical response measurement, vibration-mode 3D visualization. From January 8-9th, researchers received a 2-days on-site training by Marvin Christen, SmarAct Metrology.

Author: Dinko Oletić
Short visit to CEITEC Nano, Brno

From December 1st to 3rd, Mihael Katalenić and asst. prof. Dinko Oletić visited the CEITEC Nano Research Infrastructure in Brno, the largest open-access academic nanofabrication cleanroom site in Czech Republic. In meetings with the cleanroom staff, researchers have discussed the opportunities for collaboration.

Author: Dinko Oletić
Short visit to TU Wien, Austria

On November 5th and 6th 2024, researchers Mihael Katalenić and asst. prof. Dinko Oletić visited the TU Wien, Institute of Sensor and Actuator Systems. They presented the project, held meetings with the colleagues from Austria, visited TU Wien's MEMS cleanroom, and discussed possibilities for research collaboration.

Author: Dinko Oletić
First generation of MEMS sensors...

In October 2024, MEMS sensor samples, which were submitted for prototype microfabrication in May 2024 using the commercial technological process PiezoMUMPs, through academic programme EUROPRACTICE, have arrived. The samples are currently being tested. 

Author: Dinko Oletić
New micro-probe chamber for...

During October 2024, a micro-probe test chamber for electrical characterization of MEMS samples, was installed in our laboratory.
 

Author: Dinko Oletić

On 24th September 2024 researcher Edi Emanović defended his PhD thesis in the field of low-power microelectronic ASIC design, titled "Power management integrated circuit featuring high-efficiency analog techniques". We congratulate to Edi!

Author: Dinko Oletić
Project presented at the SEA Workshop...

From 15th to 18th September 2024, asst. prof. Dinko Oletić, researchers Mihael Katalenić, and Edi Emanović participated at the Sensors, Electronics and Emerging Applications Workshop in Cavtat, Croatia. Researchers presented the ongoing research on the project in their talk titled "Designing MEMS and electronic readout interfaces for low-power intelligent ultrasonic emission NDT sensors".

Author: Dinko Oletić
Participation at Eurosensors 2024...

Researcher Mihael Katalenić participated at the 36th edition of the Eurosensors Conference, held in Debrecen, Hungary from 1st to 4th September, 2025.

Author: Dinko Oletić
Mid-term research stay at the C2N,...

From 12th August to 14th September 2024, asst. prof. Dinko Oletić stayed at the Centre for Nanosciences and Nanotechnologies (C2N), Palaiseau, Paris, France, characterizing the custom-developed SOI-based technological cleanroom process for microfabrication piezoelectric acoustic and ultrasonic MEMS sensors.

Author: Dinko Oletić

During the July, 2024, new precision soldering station for prototype electronic systems assembly, and rework was installed in our department's electronics-workshop.

Author: Dinko Oletić
Short visit to C2N, France

From 24th to 26th June 2024, asst. prof. Dinko Oletić and researcher Mihael Katalenić visited the Centre for Nanosciences and  Nanotechnologies (C2N), Palaiseau, Paris, France. Meetings with the French colleagues of C2N, included presentation of the project, planning of research collaborations, and visit of the C2N's cleanroom laboratories.

Author: Dinko Oletić

During May 2024, laboratory was equipped with new computer workstations for numerical MEMS modelling (ANSYS, COMSOL, MATLAB), and electronic circuit design (Cadence, Altium Designer).

Author: Dinko Oletić

From April 2024, researcher Edi Emanović, and administrator Ivana Berković joined the project team, and researcher Mihael Katalenić was hired from May 2024. We welcome new team members. 

Author: Dinko Oletić