Lecture: Full field deformation and...

Department of Electronic Systems and Information Processing and Instrumentation and Measurements Chapter of the Croatian IEEE Section is organizing the lecture titled

Full-field deformation and vibration measurements of dies and mechanical microstructures by optical interference microscopy techniques

held by Alain Bosseboeuf, PhD, from the Centre for Nanosciences and Nanotechnologies (C2N), CNRS / University Paris Saclay, France, on Friday, 28th October 2022 at 10:00 h in the lecture-room D-160.

The lecture will be held in English. The planned duration is 60 min, including discussion. The lecture is open to everyone, and we especially invite PhD students, and students attending the course Sensor technologies.

More information about the lecture and the lecturer can be found below.



Microelectromechanical systems (MEMS) are based on the deformation, motion or vibrations of mechanical microstructures made in semiconductors, piezoelectric materials and/or metals. Optical techniques are commonly used for more than 20 years in our team and worldwide for the non-contact characterization of the fabrication process and electro-thermo-mechanical behavior of these microstructures with a vertical resolution in the nanometer range or below, and a lateral resolution related to optical magnification. In this talk, we will report on recent results obtained on various films and MEMS physical microsensors with in-house constructed monochromatic or white light interference microscopy systems and with other optical systems. An emphasis will be put on issues and solutions for measurements in vacuum, across wide temperature range, and on time-averaged interferometry that is not widely used for the detection of resonant frequencies and vibration modes. 

Lecturer's biography

Alain Bosseboeuf has master degrees in microelectronics and in Solid State Physics and an engineer diploma in telecommunications. He received the PhD degree in Physics from University Paris South (Orsay) in 1989. In 1983-2016 he worked as a full-time CNRS researcher on thin films, MEMS and wafer-level packaging technologies in Institut d’Electronique Fondamentale (IEF). In May 2016, he joined the Centre for Nanosciences and Nanotechnologies (C2N) of CNRS and University Paris Saclay. In close collaboration with Asst. Prof. Philippe Coste in C2N and Sylvain Petitgrand from Fogale Nanotech company, he has more than 20 years’ experience on the development of optical profilometry and vibrometry techniques and their applications to thin films, microstructures, and wafer-level packaging characterization. He is co-author of 30 papers in international journals or conferences and of a book chapter on this topic.

Author: Dinko Oletić
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