|
Šifra:
|
11378
|
|
ECTS:
|
6
|
Lecturers in charge:
|
Doc. dr. sc.
Sanda Pleslić
|
English level:
1,1,1
|
All teaching activities in the course will be held on English. This level includes courses with multiple groups (i.e., all teaching will be held strictly in Croatian for Croatian groups, and strictly in English for English groups).
|
Description:
|
Definition of plasma. Basic parameters of plasma systems: electron temperature, electron density. Collective properties of plasma. Magneto-hydrodynamic description of plasma systems. Stark broadening of spectral lines and basic quantum theory of field. Laser produced plasmas. Plasmas produced by capillary discharge. Lithography: from optical lithography to extreme ultraviolet lithography. Application of pulsed plasmas in lithography.
|
Literature:
|
- Griem, H. R., Plasma Spectroscopy, McGraw-Hill Book Company, New York, 1964.
- Hutchinson, I. H., Principles of plasma diagnostics, Cambridge University Press, Cambridge, 1987.
- Vršnak, B., Temelji fizike plazme, Školska knjiga, Zagreb, 1996.
|
|
